Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
Display,Optical Devices : Dry Etching of patterned LiNbO3 Waveguides for the High-speed Optical Modulator Fabrication
J Electr Electron Mater. 2003;16(8):731-735. Published online August 1, 2003
