Effects of Ozone Oxidation on the Contact Resistance of DRAM Cell

Jae Seung Choe; Seung Ug Lee; Bong Jo Sin; Geun Hyeong Park; Jae Bong Lee

Articles

Page Path

오존 산화가 DRAM 셀의 콘택 저항에 미치는 영향

최재승, 이승욱, 신봉조, 박근형, 이재봉

Effects of Ozone Oxidation on the Contact Resistance of DRAM Cell

Jae Seung Choe, Seung Ug Lee, Bong Jo Sin, Geun Hyeong Park, Jae Bong Lee

J Electr Electron Mater 2004;17(2):121-126.
Published online: February 1, 2004

6 Views
0 Download
0 Crossref
0 Scopus

Full Article

Download PDF

Keywords: Ozone oxidation, Contact resistance, Refresh, Write recovery time, DRAM

Cite

CITE

export

Copy Download

Format

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
BibTeX — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

Effects of Ozone Oxidation on the Contact Resistance of DRAM Cell

J Electr Electron Mater. 2004;17(2):121-126. Published online February 1, 2004

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
bib — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

Effects of Ozone Oxidation on the Contact Resistance of DRAM Cell

J Electr Electron Mater. 2004;17(2):121-126. Published online February 1, 2004

Articles

Page Path

오존 산화가 DRAM 셀의 콘택 저항에 미치는 영향

Effects of Ozone Oxidation on the Contact Resistance of DRAM Cell

Full Article

CITE

Download Citation

Format:

Include:

Related articles

ABOUT

BROWSE ARTICLES

EDITORIAL POLICIES

FOR CONTRIBUTORS