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대향타겟스퍼터링법에 의한 FBAR용 AZO(ZnOAl) 박막의 제작

금민종, 김경환

Preparation AZO(ZnOAl) Thin Film for FBAR by FTS Method

Min Jong Geum, Gyeong Hwan Kim
J Korean Inst Electr Electron Mater Eng 2004;17(4):422-425.
Published online: April 1, 2004
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Preparation AZO(ZnOAl) Thin Film for FBAR by FTS Method
J Korean Inst Electr Electron Mater Eng. 2004;17(4):422-425.   Published online April 1, 2004
DOI: https://doi.org/10.4313/JKEM.2004.17.4.422
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Preparation AZO(ZnOAl) Thin Film for FBAR by FTS Method
J Korean Inst Electr Electron Mater Eng. 2004;17(4):422-425.   Published online April 1, 2004
DOI: https://doi.org/10.4313/JKEM.2004.17.4.422
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