Skip to main navigation Skip to main content
  • KIEEME

J Electr Electron Mater : Journal of Electrical and Electronic Materials

OPEN ACCESS
Search
Advanced Search
ABOUT
BROWSE ARTICLES
EDITORIAL POLICIES
FOR CONTRIBUTORS

Articles

Page Path

안티몬 이온주입시 Sb2O3 빔튜닝 방법 및 모니터링 연구

김상용, 최민호, 김남훈, 정헌상, 장의구

A Study on Sb2O3 Beam Tuning and Monitoring in Antimony Implantation

Sang Yong Kim, Min Ho Choe, Nam Hun Kim, Heon Sang Jeong, Ui Gu Jang
J Electr Electron Mater 2004;17(5):476-480.
Published online: May 1, 2004
  • 6 Views
  • 0 Download
  • 0 Crossref
  • 0 Scopus
prev next

Full Article

Download PDF Download PDF

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

Include:

A Study on Sb2O3 Beam Tuning and Monitoring in Antimony Implantation
J Electr Electron Mater. 2004;17(5):476-480.   Published online May 1, 2004
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
Format:
Include:
A Study on Sb2O3 Beam Tuning and Monitoring in Antimony Implantation
J Electr Electron Mater. 2004;17(5):476-480.   Published online May 1, 2004
Close

Related articles

ABOUT

BROWSE ARTICLES

EDITORIAL POLICIES

FOR CONTRIBUTORS

© The Korean Institute of Electrical and Electronic Materials Engineers.