A Study on the Humidity Sensing Properties of Crystalline Carbon Nitride Films

Ji Gong Lee; Se Geun Ha; Jeong Hun Kim; Seong Pil Lee

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결정성 질화탄소막의 습도 감지특성에 관한 연구

이지공, 하세근, 김정훈, 이성필

A Study on the Humidity Sensing Properties of Crystalline Carbon Nitride Films

Ji Gong Lee, Se Geun Ha, Jeong Hun Kim, Seong Pil Lee

J Electr Electron Mater 2004;17(5):521-525.
Published online: May 1, 2004

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Keywords: Humidity sensors, Carbon nitride films, Sputtering system

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A Study on the Humidity Sensing Properties of Crystalline Carbon Nitride Films

J Electr Electron Mater. 2004;17(5):521-525. Published online May 1, 2004

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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A Study on the Humidity Sensing Properties of Crystalline Carbon Nitride Films

J Electr Electron Mater. 2004;17(5):521-525. Published online May 1, 2004

Articles

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결정성 질화탄소막의 습도 감지특성에 관한 연구

A Study on the Humidity Sensing Properties of Crystalline Carbon Nitride Films

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