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NMOS 소자에 대한 Ru1Zr1 합금 게이트 전극의 특성

이충근, 강영섭, 홍신남

Properties of Ru1Zr1 Alloy Gate Electrode for NMOS Devices

Chung Keun Lee, Young Sub Kang, Shin Nam Hong
J Korean Inst Electr Electron Mater Eng 2004;17(6):602-607.
Published online: June 1, 2004
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Properties of Ru1Zr1 Alloy Gate Electrode for NMOS Devices
J Korean Inst Electr Electron Mater Eng. 2004;17(6):602-607.   Published online June 1, 2004
DOI: https://doi.org/10.4313/JKEM.2004.17.6.602
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Properties of Ru1Zr1 Alloy Gate Electrode for NMOS Devices
J Korean Inst Electr Electron Mater Eng. 2004;17(6):602-607.   Published online June 1, 2004
DOI: https://doi.org/10.4313/JKEM.2004.17.6.602
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