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센서,기능성 박막 ; Bias 전압에 따른 ZnO:Al 투명전도막의 전기적 특성

박강일, 김병섭, 임동건, 이수호, 곽동주

Substrate Bias Voltage Dependence of Electrical Properties for ZnO:Al Film by DC Magnetron Sputtering

Kang Il Park, Byung Sub Kim, Dong Gun Lim, Su Ho Lee, Dong Joo Kwak
J Electr Electron Mater 2004;17(7):738-746.
Published online: July 1, 2004
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Substrate Bias Voltage Dependence of Electrical Properties for ZnO:Al Film by DC Magnetron Sputtering
J Electr Electron Mater. 2004;17(7):738-746.   Published online July 1, 2004
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Substrate Bias Voltage Dependence of Electrical Properties for ZnO:Al Film by DC Magnetron Sputtering
J Electr Electron Mater. 2004;17(7):738-746.   Published online July 1, 2004
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