Substrate Bias Voltage Dependence of Electrical Properties for ZnO:Al Film by DC Magnetron Sputtering

Kang Il Park; Byung Sub Kim; Dong Gun Lim; Su Ho Lee; Dong Joo Kwak

doi:10.4313/JKEM.2004.17.7.738

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센서,기능성 박막 ; Bias 전압에 따른 ZnO:Al 투명전도막의 전기적 특성

박강일, 김병섭, 임동건, 이수호, 곽동주

Substrate Bias Voltage Dependence of Electrical Properties for ZnO:Al Film by DC Magnetron Sputtering

Kang Il Park, Byung Sub Kim, Dong Gun Lim, Su Ho Lee, Dong Joo Kwak

J Korean Inst Electr Electron Mater Eng 2004;17(7):738-746.
Published online: July 1, 2004

DOI: https://doi.org/10.4313/JKEM.2004.17.7.738

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Keywords: ZnO:Al film, DC magnetron sputtering, Resistivity, Transmittance, Bias voltage

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Substrate Bias Voltage Dependence of Electrical Properties for ZnO:Al Film by DC Magnetron Sputtering

J Korean Inst Electr Electron Mater Eng. 2004;17(7):738-746. Published online July 1, 2004

DOI: https://doi.org/10.4313/JKEM.2004.17.7.738

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Substrate Bias Voltage Dependence of Electrical Properties for ZnO:Al Film by DC Magnetron Sputtering

J Korean Inst Electr Electron Mater Eng. 2004;17(7):738-746. Published online July 1, 2004

DOI: https://doi.org/10.4313/JKEM.2004.17.7.738

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센서,기능성 박막 ; Bias 전압에 따른 ZnO:Al 투명전도막의 전기적 특성

Substrate Bias Voltage Dependence of Electrical Properties for ZnO:Al Film by DC Magnetron Sputtering

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