Electric Properties of MFIS Capacitors using Pt/LiNbO3/AIN/Si(100) Structure

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Pt/LiNbO3/AIN/Si(100) 구조를 이용한 MFIS 커패시터의 전기적 특성

정순원, 김광호

Electric Properties of MFIS Capacitors using Pt/LiNbO3/AIN/Si(100) Structure

J Electr Electron Mater 2004;17(12):1283-1288.
Published online: December 1, 2004

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Keywords: MFIS capacitor, Rapid thermal anneal, Non-volatile memory, Hysteresis, LiNbO3/AIN/Si(100) structure

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Electric Properties of MFIS Capacitors using Pt/LiNbO3/AIN/Si(100) Structure

J Electr Electron Mater. 2004;17(12):1283-1288. Published online December 1, 2004

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Electric Properties of MFIS Capacitors using Pt/LiNbO3/AIN/Si(100) Structure

J Electr Electron Mater. 2004;17(12):1283-1288. Published online December 1, 2004

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Pt/LiNbO3/AIN/Si(100) 구조를 이용한 MFIS 커패시터의 전기적 특성

Electric Properties of MFIS Capacitors using Pt/LiNbO3/AIN/Si(100) Structure

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