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CMP에서의 스틱-슬립 마찰특성에 관한 연구

이현섭, 박범영, 서헌덕, 박기현, 정해도

A Study on the Characteristics of Stick-slip Friction in CMP

, , , ,
J Electr Electron Mater 2005;18(4):313-320.
Published online: April 1, 2005
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A Study on the Characteristics of Stick-slip Friction in CMP
J Electr Electron Mater. 2005;18(4):313-320.   Published online April 1, 2005
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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A Study on the Characteristics of Stick-slip Friction in CMP
J Electr Electron Mater. 2005;18(4):313-320.   Published online April 1, 2005
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