Measurement of Ar Temperature of Hollow Cathode Discharge Plasma

Jun Hoi Lee; Jae Soo Shin; Sung Jik Lee; Min Soo Lee

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Measurement of Ar Temperature of Hollow Cathode Discharge Plasma

Jun Hoi Lee, Jae Soo Shin, Sung Jik Lee, Min Soo Lee

J Electr Electron Mater 2005;18(4):381-385.
Published online: April 1, 2005

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Keywords: Optogalvanic effect, Plasma temperature, Hollow cathode

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Measurement of Ar Temperature of Hollow Cathode Discharge Plasma

J Electr Electron Mater. 2005;18(4):381-385. Published online April 1, 2005

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Measurement of Ar Temperature of Hollow Cathode Discharge Plasma

J Electr Electron Mater. 2005;18(4):381-385. Published online April 1, 2005

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Measurement of Ar Temperature of Hollow Cathode Discharge Plasma

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