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Measurement of Ar Temperature of Hollow Cathode Discharge Plasma

Jun Hoi Lee, Jae Soo Shin, Sung Jik Lee, Min Soo Lee
J Korean Inst Electr Electron Mater Eng 2005;18(4):381-385.
Published online: April 1, 2005
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Measurement of Ar Temperature of Hollow Cathode Discharge Plasma
J Korean Inst Electr Electron Mater Eng. 2005;18(4):381-385.   Published online April 1, 2005
DOI: https://doi.org/10.4313/JKEM.2005.18.4.381
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Include:
Measurement of Ar Temperature of Hollow Cathode Discharge Plasma
J Korean Inst Electr Electron Mater Eng. 2005;18(4):381-385.   Published online April 1, 2005
DOI: https://doi.org/10.4313/JKEM.2005.18.4.381
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