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높은 A/R의 콘택 산화막 에칭에서 바닥모양 변형 개선에 관한 연구

황원태, 김길호

A Study on The Improvement of Profile Tilting or Bottom Distortion in HARC

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J Electr Electron Mater 2005;18(5):389-395.
Published online: May 1, 2005
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A Study on The Improvement of Profile Tilting or Bottom Distortion in HARC
J Electr Electron Mater. 2005;18(5):389-395.   Published online May 1, 2005
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
A Study on The Improvement of Profile Tilting or Bottom Distortion in HARC
J Electr Electron Mater. 2005;18(5):389-395.   Published online May 1, 2005
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