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사파이어 기판 위에 증착된 ZnO 박막의 기판온도와 산소 가스량에 따른 특성

김재홍, 이천

Effect of Variation of Substrate Temperature and Oxygen Gas Flow of the ZnO Thin Films Deposited on Sapphire

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J Electr Electron Mater 2005;18(7):652-655.
Published online: July 1, 2005
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Effect of Variation of Substrate Temperature and Oxygen Gas Flow of the ZnO Thin Films Deposited on Sapphire
J Electr Electron Mater. 2005;18(7):652-655.   Published online July 1, 2005
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Effect of Variation of Substrate Temperature and Oxygen Gas Flow of the ZnO Thin Films Deposited on Sapphire
J Electr Electron Mater. 2005;18(7):652-655.   Published online July 1, 2005
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