Antenna Dependency of Mode Transition in Cylindrical ICP Light-source

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원통형 ICP 광원 모드변환의 안테나 의존성

양종경, 백광현, 이종찬, 박대희, 윤양웅

Antenna Dependency of Mode Transition in Cylindrical ICP Light-source

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J Electr Electron Mater 2005;18(8):772-778.
Published online: August 1, 2005

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Keywords: Inductively coupled plasma, ICP, E-mode, H-mode, Mode transition

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Antenna Dependency of Mode Transition in Cylindrical ICP Light-source

J Electr Electron Mater. 2005;18(8):772-778. Published online August 1, 2005

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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bib — For JabRef, BibDesk, and other BibTeX-specific software

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Citation for the content below
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Antenna Dependency of Mode Transition in Cylindrical ICP Light-source

J Electr Electron Mater. 2005;18(8):772-778. Published online August 1, 2005

Articles

Page Path

원통형 ICP 광원 모드변환의 안테나 의존성

Antenna Dependency of Mode Transition in Cylindrical ICP Light-source

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