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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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대향타겟식 스퍼터링법을 이용한 TOLED용 ITO 박막의 산소 가스 의존성

금민종, 김경환

Dependence on the Oxygen Gas of ITO Thin Film for TOLED by Facing Targets Sputtering Method

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J Electr Electron Mater 2006;19(1):87-90.
Published online: January 1, 2006
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Dependence on the Oxygen Gas of ITO Thin Film for TOLED by Facing Targets Sputtering Method
J Electr Electron Mater. 2006;19(1):87-90.   Published online January 1, 2006
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Dependence on the Oxygen Gas of ITO Thin Film for TOLED by Facing Targets Sputtering Method
J Electr Electron Mater. 2006;19(1):87-90.   Published online January 1, 2006
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