Box Cathode Sputtering Technologies for Organic-based Optoelectronics

Han Ki Kim

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유기물 광전소자 제작을 위한 박스 케소드 스퍼터 기술

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Box Cathode Sputtering Technologies for Organic-based Optoelectronics

Han Ki Kim

J Electr Electron Mater 2006;19(4):373-378.
Published online: April 1, 2006

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Keywords: Plasma damage-free, OLED, Box cathode sputtering, BCS, Leakage current, High-density plasma

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Box Cathode Sputtering Technologies for Organic-based Optoelectronics

J Electr Electron Mater. 2006;19(4):373-378. Published online April 1, 2006

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Box Cathode Sputtering Technologies for Organic-based Optoelectronics

J Electr Electron Mater. 2006;19(4):373-378. Published online April 1, 2006

Articles

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유기물 광전소자 제작을 위한 박스 케소드 스퍼터 기술

Box Cathode Sputtering Technologies for Organic-based Optoelectronics

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