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C-축 배향된 ZnO 박막을 이용하여 제작한 압전형 마이크로 스피커의 특성 평가

이승환, 서경원, 유금표, 권순용

Characterization of Piezoelectric Microspeaker Fabricated with C-axis Oriented ZnO Thin Film

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J Electr Electron Mater 2006;19(6):531-537.
Published online: June 1, 2006
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Characterization of Piezoelectric Microspeaker Fabricated with C-axis Oriented ZnO Thin Film
J Electr Electron Mater. 2006;19(6):531-537.   Published online June 1, 2006
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Characterization of Piezoelectric Microspeaker Fabricated with C-axis Oriented ZnO Thin Film
J Electr Electron Mater. 2006;19(6):531-537.   Published online June 1, 2006
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