Fabrication and Characterization of 32×32 Silicon Cantilever Array using MEMS Process

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MEMS 공정을 이용한 32×32 실리콘 캔틸레버 어레이 제작 및 특성 평가

김영식, 나기열, 신윤수, 박근형, 김영석

Fabrication and Characterization of 32×32 Silicon Cantilever Array using MEMS Process

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J Electr Electron Mater 2006;19(10):894-900.
Published online: October 1, 2006

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Keywords: AFM, MEMS, Nano-scaled memory, SPM, Thermal probe array

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Fabrication and Characterization of 32×32 Silicon Cantilever Array using MEMS Process

J Electr Electron Mater. 2006;19(10):894-900. Published online October 1, 2006

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Fabrication and Characterization of 32×32 Silicon Cantilever Array using MEMS Process

J Electr Electron Mater. 2006;19(10):894-900. Published online October 1, 2006

Articles

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MEMS 공정을 이용한 32×32 실리콘 캔틸레버 어레이 제작 및 특성 평가

Fabrication and Characterization of 32×32 Silicon Cantilever Array using MEMS Process

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