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RFCVD 장치를 이용하여 성장한 실리콘 나노와이어의 특성

김재훈, 이형주, 신석승, 김기영, 고춘수, 김현숙, 황용규, 이충훈

Properties of Silicon Nanowires grown by RFCVD

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J Electr Electron Mater 2007;20(2):101-105.
Published online: February 1, 2007
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Properties of Silicon Nanowires grown by RFCVD
J Electr Electron Mater. 2007;20(2):101-105.   Published online February 1, 2007
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Properties of Silicon Nanowires grown by RFCVD
J Electr Electron Mater. 2007;20(2):101-105.   Published online February 1, 2007
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