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다양한 산화물 기판 위에 RF 마그네트론 스퍼터링 방법으로 성장된 ZnO 박막의 특성 비교

이재욱, 정철원, 한석규, 최준호, 홍순구, 조형균, 송정훈, 이정용

Comparison on Properties of ZnO Thin Films Grown by RF Magnetron Sputtering on Various Oxide Substrates

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J Electr Electron Mater 2007;20(4):289-293.
Published online: April 1, 2007
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Comparison on Properties of ZnO Thin Films Grown by RF Magnetron Sputtering on Various Oxide Substrates
J Electr Electron Mater. 2007;20(4):289-293.   Published online April 1, 2007
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Comparison on Properties of ZnO Thin Films Grown by RF Magnetron Sputtering on Various Oxide Substrates
J Electr Electron Mater. 2007;20(4):289-293.   Published online April 1, 2007
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