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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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졸 - 겔법으로 형성한 강유전체 PZT 박막의 고온 단시간 열처리효과 및 전자 디바이스에의 응용

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The Rapid Thermal Annealing Effects and its Application to Electron Devices of Sol - Gel Derived Ferroelectric PZT Thin Films

Kwang ho Kim
J Electr Electron Mater 1994;7(2):152-156.
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The Rapid Thermal Annealing Effects and its Application to Electron Devices of Sol - Gel Derived Ferroelectric PZT Thin Films
J Electr Electron Mater. 1994;7(2):152-156.
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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The Rapid Thermal Annealing Effects and its Application to Electron Devices of Sol - Gel Derived Ferroelectric PZT Thin Films
J Electr Electron Mater. 1994;7(2):152-156.
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