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Nano-scale PMOSFET에서 Plasma Nitrided Oixde에 대한 소자 특성의 의존성

한인식, 지희환, 구태규, 유욱상, 최원호, 박성형, 이희승, 강영석, 김대병, 이희덕

Dependency of the Device Characteristics on Plasma Nitrided Oxide for Nano-scale PMOSFET

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J Korean Inst Electr Electron Mater Eng 2007;20(7):569-574.
Published online: July 1, 2007
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Dependency of the Device Characteristics on Plasma Nitrided Oxide for Nano-scale PMOSFET
J Korean Inst Electr Electron Mater Eng. 2007;20(7):569-574.   Published online July 1, 2007
DOI: https://doi.org/10.4313/JKEM.2007.20.7.569
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
Format:
Include:
Dependency of the Device Characteristics on Plasma Nitrided Oxide for Nano-scale PMOSFET
J Korean Inst Electr Electron Mater Eng. 2007;20(7):569-574.   Published online July 1, 2007
DOI: https://doi.org/10.4313/JKEM.2007.20.7.569
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