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SF6분자가스의 압력 의존도

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The Dependence on the Gas Pressure in SF6 Molecular Gas

J Electr Electron Mater 2007;20(9):816-820.
Published online: September 1, 2007
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The Dependence on the Gas Pressure in SF6 Molecular Gas
J Electr Electron Mater. 2007;20(9):816-820.   Published online September 1, 2007
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
The Dependence on the Gas Pressure in SF6 Molecular Gas
J Electr Electron Mater. 2007;20(9):816-820.   Published online September 1, 2007
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