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RF 마그네트론 스퍼터링법으로 증착한 ZnO 박막의 증착온도에 따른 구조 및 전기적 특성

오수영, 김응권, 이태용, 강현일, 이종환, 송준태

Dependences of Various Substrate Temperature on the Structural and Electrical Properties of ZnO Thin Films deposited by RE Magnetron Sputtering

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J Electr Electron Mater 2007;20(11):965-968.
Published online: November 1, 2007
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Dependences of Various Substrate Temperature on the Structural and Electrical Properties of ZnO Thin Films deposited by RE Magnetron Sputtering
J Electr Electron Mater. 2007;20(11):965-968.   Published online November 1, 2007
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Dependences of Various Substrate Temperature on the Structural and Electrical Properties of ZnO Thin Films deposited by RE Magnetron Sputtering
J Electr Electron Mater. 2007;20(11):965-968.   Published online November 1, 2007
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