A Study on Cleaning Process of RIE Damaged Silicon

Eun Gu Lee; Jae Gab Lee; Jae Jeong Kim

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반응성 이온 식각에 의해 손상된 실리콘의 세정에 관한 연구

이은구, 이재갑, 김재정

A Study on Cleaning Process of RIE Damaged Silicon

Eun Gu Lee, Jae Gab Lee, Jae Jeong Kim

J Electr Electron Mater 1994;7(4):294-298.

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A Study on Cleaning Process of RIE Damaged Silicon

J Electr Electron Mater. 1994;7(4):294-298.

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A Study on Cleaning Process of RIE Damaged Silicon

J Electr Electron Mater. 1994;7(4):294-298.

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반응성 이온 식각에 의해 손상된 실리콘의 세정에 관한 연구

A Study on Cleaning Process of RIE Damaged Silicon

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