The Micro Bubble Effect in the Seed Adhesion on the Crystal Quality of 6H- SiC grown by a Physical Vapor Transport (PVT) Process

Jung Gon Kim; Jung Gyu Kim; Chang Hyun Son; Jung Woo Choi; Hyun Hee Hwang; Won Jae Lee; Il Soo Kim; Byoung Chul Shin

doi:10.4313/JKEM.2008.21.3.222

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종자정 부착 시 생성되는 마이크로 기공이 PVT법에 의하여 성장시킨 6H-SiC 결정질에 미치는 영향

김정곤, 김정규, 손창현, 최정우, 황현희, 이원재, 김일수, 신병철

The Micro Bubble Effect in the Seed Adhesion on the Crystal Quality of 6H- SiC grown by a Physical Vapor Transport (PVT) Process

Jung Gon Kim, Jung Gyu Kim, Chang Hyun Son, Jung Woo Choi, Hyun Hee Hwang, Won Jae Lee, Il Soo Kim, Byoung Chul Shin

J Korean Inst Electr Electron Mater Eng 2008;21(3):222-226.
Published online: March 1, 2008

DOI: https://doi.org/10.4313/JKEM.2008.21.3.222

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Keywords: SiC, Sublimation, PVT, Micro-bubble, Seed adhesion, Sucrose

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The Micro Bubble Effect in the Seed Adhesion on the Crystal Quality of 6H- SiC grown by a Physical Vapor Transport (PVT) Process

J Korean Inst Electr Electron Mater Eng. 2008;21(3):222-226. Published online March 1, 2008

DOI: https://doi.org/10.4313/JKEM.2008.21.3.222

Download Citation

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The Micro Bubble Effect in the Seed Adhesion on the Crystal Quality of 6H- SiC grown by a Physical Vapor Transport (PVT) Process

J Korean Inst Electr Electron Mater Eng. 2008;21(3):222-226. Published online March 1, 2008

DOI: https://doi.org/10.4313/JKEM.2008.21.3.222

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종자정 부착 시 생성되는 마이크로 기공이 PVT법에 의하여 성장시킨 6H-SiC 결정질에 미치는 영향

The Micro Bubble Effect in the Seed Adhesion on the Crystal Quality of 6H- SiC grown by a Physical Vapor Transport (PVT) Process

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