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Si 기판에 제작된 AAO 박막의 기공 형성 최적화에 관한 연구

권순일, 양계준, 송우창, 이재형, 임동건

A Study of Pore Formation of AAO Film on Si Substrate with Optimizing Process

Soon Il Kwon, Kea Joon Yang, Woo Chang Song, Jae Hyeong Lee, Dong Gun Lim
J Korean Inst Electr Electron Mater Eng 2008;21(5):415-420.
Published online: May 1, 2008
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A Study of Pore Formation of AAO Film on Si Substrate with Optimizing Process
J Korean Inst Electr Electron Mater Eng. 2008;21(5):415-420.   Published online May 1, 2008
DOI: https://doi.org/10.4313/JKEM.2008.21.5.415
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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A Study of Pore Formation of AAO Film on Si Substrate with Optimizing Process
J Korean Inst Electr Electron Mater Eng. 2008;21(5):415-420.   Published online May 1, 2008
DOI: https://doi.org/10.4313/JKEM.2008.21.5.415
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