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기판 온도 변화에 따른 AIN 박막 성장에 잔류 산소가 미치는 영향

김병균, 이을택, 김응권, 정석원, 노용한

Influence of Residual Oxygen on the growth of AIN Thin Films with Substrate Temperature

Byoung Kyun Kim, Eul Tack Lee, Eung Kwon Kim, Seok Won Jeong, Yong Han Roh
J Electr Electron Mater 2008;21(5):463-467.
Published online: May 1, 2008
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Influence of Residual Oxygen on the growth of AIN Thin Films with Substrate Temperature
J Electr Electron Mater. 2008;21(5):463-467.   Published online May 1, 2008
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Influence of Residual Oxygen on the growth of AIN Thin Films with Substrate Temperature
J Electr Electron Mater. 2008;21(5):463-467.   Published online May 1, 2008
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