A Study on the Characteristics of Negative Photoresist using Inorganic a - Se75 Ge25 Thin Film

Hong Bay Chung; Hoon Huh; Tae Wan Kim

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무기질 a - Se75 Ge25 박막을 이용한 네가 티브형 포토레지스트의 특성연구

정홍배, 허훈, 김태완

A Study on the Characteristics of Negative Photoresist using Inorganic a - Se75 Ge25 Thin Film

Hong Bay Chung, Hoon Huh, Tae Wan Kim

J Korean Inst Electr Electron Mater Eng 1988;1(4):295-301.

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A Study on the Characteristics of Negative Photoresist using Inorganic a - Se75 Ge25 Thin Film

J Korean Inst Electr Electron Mater Eng. 1988;1(4):295-301.

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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A Study on the Characteristics of Negative Photoresist using Inorganic a - Se75 Ge25 Thin Film

J Korean Inst Electr Electron Mater Eng. 1988;1(4):295-301.

Articles

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무기질 a - Se75 Ge25 박막을 이용한 네가 티브형 포토레지스트의 특성연구

A Study on the Characteristics of Negative Photoresist using Inorganic a - Se75 Ge25 Thin Film

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