A Study on the Characteristics of Negative Photoresist using Inorganic a - Se75 Ge25 Thin Film

Hong Bay Chung; Hoon Huh; Tae Wan Kim

Articles

Page Path

무기질 a - Se75 Ge25 박막을 이용한 네가 티브형 포토레지스트의 특성연구

정홍배, 허훈, 김태완

A Study on the Characteristics of Negative Photoresist using Inorganic a - Se75 Ge25 Thin Film

Hong Bay Chung, Hoon Huh, Tae Wan Kim

J Electr Electron Mater 1988;1(4):295-301.

2 Views
1 Download
0 Crossref
0 Scopus

Full Article

Download PDF

Cite

CITE

export

Copy Download

Format

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
BibTeX — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

A Study on the Characteristics of Negative Photoresist using Inorganic a - Se75 Ge25 Thin Film

J Electr Electron Mater. 1988;1(4):295-301.

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
bib — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

A Study on the Characteristics of Negative Photoresist using Inorganic a - Se75 Ge25 Thin Film

J Electr Electron Mater. 1988;1(4):295-301.

Articles

Page Path

무기질 a - Se75 Ge25 박막을 이용한 네가 티브형 포토레지스트의 특성연구

A Study on the Characteristics of Negative Photoresist using Inorganic a - Se75 Ge25 Thin Film

Full Article

CITE

Download Citation

Format:

Include:

Related articles

ABOUT

BROWSE ARTICLES

EDITORIAL POLICIES

FOR CONTRIBUTORS