A Study on the E - beam Resist Characteristics of Plasma Polymerized Styrene

Duck Chool Lee; Jong Kwan Park

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플라즈마중합 스티렌 박막의 e - beam 레지스트 특성에 관한 연구

이덕출, 박종관

A Study on the E - beam Resist Characteristics of Plasma Polymerized Styrene

Duck Chool Lee, Jong Kwan Park

J Electr Electron Mater 1994;7(5):425-429.

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A Study on the E - beam Resist Characteristics of Plasma Polymerized Styrene

J Electr Electron Mater. 1994;7(5):425-429.

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A Study on the E - beam Resist Characteristics of Plasma Polymerized Styrene

J Electr Electron Mater. 1994;7(5):425-429.

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플라즈마중합 스티렌 박막의 e - beam 레지스트 특성에 관한 연구

A Study on the E - beam Resist Characteristics of Plasma Polymerized Styrene

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