Characterization of ZnO Thin Films and Ga doped ZnO Thin Films Post Annealing for Transparent Conducting Oxide Application

Jae Ho Jang; Hyo Jun Bae; Ji Su Lee; Kwang Hyun Jung; Hyon Kwang Choi; Min Hyon Jeon

doi:10.4313/JKEM.2009.22.7.567

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투명전극 응용을 위한 ZnO박막과 Ga 도핑 된 ZnO박막의 성장 후 열처리에 따른 특성분석

장재호, 배효준, 이지수, 정광현, 최현광, 전민현

Characterization of ZnO Thin Films and Ga doped ZnO Thin Films Post Annealing for Transparent Conducting Oxide Application

Jae Ho Jang, Hyo Jun Bae, Ji Su Lee, Kwang Hyun Jung, Hyon Kwang Choi, Min Hyon Jeon

J Korean Inst Electr Electron Mater Eng 2009;22(7):567-571.
Published online: July 1, 2009

DOI: https://doi.org/10.4313/JKEM.2009.22.7.567

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Keywords: Thin film, ZnO, GZO, RF magnetron sputter, Annealing, Transparent conducting oxide

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Characterization of ZnO Thin Films and Ga doped ZnO Thin Films Post Annealing for Transparent Conducting Oxide Application

J Korean Inst Electr Electron Mater Eng. 2009;22(7):567-571. Published online July 1, 2009

DOI: https://doi.org/10.4313/JKEM.2009.22.7.567

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Characterization of ZnO Thin Films and Ga doped ZnO Thin Films Post Annealing for Transparent Conducting Oxide Application

J Korean Inst Electr Electron Mater Eng. 2009;22(7):567-571. Published online July 1, 2009

DOI: https://doi.org/10.4313/JKEM.2009.22.7.567

Van der Waals Integration of Dielectrics and Metal Contacts with Two-Dimensional Semiconductors for Emerging Nanoelectronics

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투명전극 응용을 위한 ZnO박막과 Ga 도핑 된 ZnO박막의 성장 후 열처리에 따른 특성분석

Characterization of ZnO Thin Films and Ga doped ZnO Thin Films Post Annealing for Transparent Conducting Oxide Application

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