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Al 이온 주입된 p-type 4H-SiC에 형성된 Ni/Al 오믹접촉의 전기 전도 특성

주성재, 송재열, 강인호, 방욱, 김상철, 김남균, 이용재

Conduction Properties of Ni/Al Ohmic Contacts to Al-implanted p-type 4H-SiC

Sung Jae Joo, Jae Yeol Song, In Ho Kang, Wook Bahng, Sang Cheol Kim, Nam Kyun Kim, Yong Jae Lee
J Electr Electron Mater 2009;22(9):717-723.
Published online: September 1, 2009
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Conduction Properties of Ni/Al Ohmic Contacts to Al-implanted p-type 4H-SiC
J Electr Electron Mater. 2009;22(9):717-723.   Published online September 1, 2009
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Conduction Properties of Ni/Al Ohmic Contacts to Al-implanted p-type 4H-SiC
J Electr Electron Mater. 2009;22(9):717-723.   Published online September 1, 2009
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