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기판 열처리가 롤투롤 스퍼터를 이용하여 성장시킨 터치 패널용 유연 ITO 투명 전극의 특성에 미치는 효과 연구

김동주, 이원영, 김봉석, 김한기

Effect of Substrate Preheating on the Characteristics of Flexible and Transparent ITO Electrodes Grown by Roll-to-Roll Sputtering for Touch Panel Applications

Dong Ju Kim, Won Young Lee, Bong Seok Kim, Han Ki Kim
J Electr Electron Mater 2010;23(4):327-332.
Published online: April 1, 2010
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Effect of Substrate Preheating on the Characteristics of Flexible and Transparent ITO Electrodes Grown by Roll-to-Roll Sputtering for Touch Panel Applications
J Electr Electron Mater. 2010;23(4):327-332.   Published online April 1, 2010
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Effect of Substrate Preheating on the Characteristics of Flexible and Transparent ITO Electrodes Grown by Roll-to-Roll Sputtering for Touch Panel Applications
J Electr Electron Mater. 2010;23(4):327-332.   Published online April 1, 2010
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