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RF / DC 마그네트론 스퍼터법을 이용한 BaTiO3 계 세라믹 박막의 제조와 PTC 특성

박춘배, 송민종, 김태완, 강도열

Preparation and PTC Properties of Thin Films BaTiO3 Ceramic System using RF / DC Magnetron Sputtering Method

Choon Bae Park, Min Jong Song, Tae Wan Kim, Dou Yol Kang
J Electr Electron Mater 1995;8(1):77-81.
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Preparation and PTC Properties of Thin Films BaTiO3 Ceramic System using RF / DC Magnetron Sputtering Method
J Electr Electron Mater. 1995;8(1):77-81.
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Preparation and PTC Properties of Thin Films BaTiO3 Ceramic System using RF / DC Magnetron Sputtering Method
J Electr Electron Mater. 1995;8(1):77-81.
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