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신경회로망을 이요한 PECVD 산화막의 특성 모형화

이은진, 김태선

Modeling of PECVD Oxide Film Properties Using Neural Networks

Eun Jin Lee, Tae Seon Kim
J Korean Inst Electr Electron Mater Eng 2010;23(11):831-836.
Published online: November 1, 2010
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Modeling of PECVD Oxide Film Properties Using Neural Networks
J Korean Inst Electr Electron Mater Eng. 2010;23(11):831-836.   Published online November 1, 2010
DOI: https://doi.org/10.4313/JKEM.2010.23.11.831
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Modeling of PECVD Oxide Film Properties Using Neural Networks
J Korean Inst Electr Electron Mater Eng. 2010;23(11):831-836.   Published online November 1, 2010
DOI: https://doi.org/10.4313/JKEM.2010.23.11.831
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