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Cr/n-AlGaN/GaN Schottky Contact에서 높은 쇼트키 장벽 형성 메카니즘에 관한 연구

남효덕, 이영민, 장자순

Regular Paper : Formation Mechanism of a Large Schottky Barrier Height for Cr-AlGaN/GaN Heterostructure

Hyo Duk Nam, Yeung Min Lee, Ja Soon Jang
J Electr Electron Mater 2011;24(4):266-270.
Published online: April 1, 2011
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We report on the formation mechanism of large Schottky barrier height (SBH) of nonalloyed Cr Schottky contacts on strained Al0.25Ga0.75N/GaN. Based on the current-voltage (I-V) and capacitance-voltage (C-V) data, the SBHs are determined to be 1.98 (±0.02) and 2.07 (±0.02) eV from the thermionic field emission and two-dimensional electron gas (2DEG) calculations, respectively. Possible formation mechanism of large SBH will be described in terms of the formation of Cr-O chemical bonding at the interface between Cr and AlGaN/GaN, low binding-energy shift to surface Fermi level, and the reduction of 2DEG electrons.

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Regular Paper : Formation Mechanism of a Large Schottky Barrier Height for Cr-AlGaN/GaN Heterostructure
J Electr Electron Mater. 2011;24(4):266-270.   Published online April 1, 2011
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Regular Paper : Formation Mechanism of a Large Schottky Barrier Height for Cr-AlGaN/GaN Heterostructure
J Electr Electron Mater. 2011;24(4):266-270.   Published online April 1, 2011
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