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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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반도체 : 용액공정을 이용한 ZnSnO 산화물 반도체 박막 트랜지스터에서 Mg 첨가에 따른 영향

최준영, 박기호, 김상식, 이상렬

Regular Paper : Semiconductor ; Electrical Properties of Mg Doped ZnSnO TFTs Fabricated by Solution-process

Jun Young Choi, Ki Ho Park, Sang Sig Kim, Sang Yeol Lee
J Electr Electron Mater 2011;24(9):697-700.
Published online: September 1, 2011
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Thin-film transistors(TFTs) with magnesium zinc tin oxide(MZTO) channel layer are fabricated by solution-process. The threshold voltage (Vth) shifted toward positive directly with increasing Mg contents in MZTO system. Because the Mg has a lower standard electrode potential (SEP) than Sn, Zn, thus degenerate the oxygen vacancy (VO). As a result, the Mg act as carrier suppressor and oxygen binder in the MZTO as well as a Vth controller.

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Regular Paper : Semiconductor ; Electrical Properties of Mg Doped ZnSnO TFTs Fabricated by Solution-process
J Electr Electron Mater. 2011;24(9):697-700.   Published online September 1, 2011
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Regular Paper : Semiconductor ; Electrical Properties of Mg Doped ZnSnO TFTs Fabricated by Solution-process
J Electr Electron Mater. 2011;24(9):697-700.   Published online September 1, 2011
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