Oxygen Effect of SiOxNy Films by RF Sputter

Sung Hwan Im

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RF Sputter 에 의한 SiNy 막 제작에서의 산소 주입효과

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Oxygen Effect of SiOxNy Films by RF Sputter

Sung Hwan Im

J Korean Inst Electr Electron Mater Eng 1989;2(1):25-32.

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Oxygen Effect of SiOxNy Films by RF Sputter

J Korean Inst Electr Electron Mater Eng. 1989;2(1):25-32.

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Oxygen Effect of SiOxNy Films by RF Sputter

J Korean Inst Electr Electron Mater Eng. 1989;2(1):25-32.

Articles

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RF Sputter 에 의한 SiNy 막 제작에서의 산소 주입효과

Oxygen Effect of SiOxNy Films by RF Sputter

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