ZnO nanowires on the a-, c- and m-plane oriented 4H-SiC substrates were grown by using a high temperature tube furnace, Ti/Au electrodes were deposited on ZnO nanowires and a-, c- and m-plane 4H-SiC substrates, respectively. The shape and density of the ZnO nanowires were inestigated by field emission scanning electron microscope. It was found that the growth direction of nanowires depends strongly on growth parameters such as growth temperature and pressure. In this work, The sensitivity of nanowires formed a-, c- and m-plane oriented 4H-SiC gas sensor was measured at 300℃ with CO gas concentration of 80%. The nanowires grown on a-plane oriented 4H-SiC show improved performance than those on c- and m-plane oriented 4H-SiC due to the increased density of nanowire on a plane 4H-SiC.
