A comparative study has been attempted for microwave and conventional sintering of lead-freeBi0.5Na0.5TiO3(BNT)-based multilayer ceramic actuators(MLAs). It was found that microwave sintering(MWS) could be successfully applied to the co-firing of piezoceramic/AgPd MLAs with a 10 timesshorter firing cycle as well as 100℃ lower firing temperature (850℃) for sufficient densification thanconventional furnace sintering (950℃). Furthermore, MWS-derived specimens showed better electricfield-induced strain than that of CFS-derived specimens by effectively suppressing interdiffusions betweenceramic and electrode layers.
