BaTiO3 nano powder can be synthesized by hydrate salt method at 120℃ in air. Decreasing the thickness of thick film, the nano dielectric particle is needed in electronic ceramics. However, the synthesis of BaTiO3 nano particle at low temperature in air and their mechanism were not reported enough. And ultrasonic treatment can be tried because of low temperature process in air. Therefore, in this study, the BaTiO3 nano powder was synthesised with the synthesis time and ultrasonic treatment at120oC in air. In the synthesis process, the effects of process were evaluated. From the experimental observation, the synthesis mechanism was proposed. The homogeneous BaTiO3 particle was synthesized by KOH salt solution at 120℃ for 1hour. It was conformed that the ultrasonic treatment effected on theincrease of synthesis rate. After cutting the salt powder using FIB, BaTiO3 nano particles observed homogeneously in the cross-section of the salt particle.
