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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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박막,센서 : 탄소섬유 물리적 특성 향상을 위한 스퍼터링 탄소박막의 특성에 대한 연구

박철민, 박용섭, 김재문

Thin Films and Sensors : Regular Paper ; Characteristics of Sputtering Carbon Films for the Improvement of Physical Properties in Carbon Fiber

Chulmin Park, Yong Seob Park, Jae Moon Kim
J Electr Electron Mater 2015;28(11):694-697.
Published online: November 1, 2015
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We investigated the characterizations of carbon films fabricated by dual magnetron sputtering under various RF powers for the improvement of physical properties in carbon fiber (CF). All sputtered carbon films exhibited amorphous structure, regardless of RF powers, resulting in uniform and smooth surfaces. The hardness and elastic modulus are increased with the increase of RF power, and the adhesion and friction properties of carbon films were improved with the increase of RF power. In the results, The increase of RF power in the sputtering method improved tribological properties of the carbon films, and these attributes can be expected to improve the physical properties of the carbon fiber reinforcement plastics.

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Thin Films and Sensors : Regular Paper ; Characteristics of Sputtering Carbon Films for the Improvement of Physical Properties in Carbon Fiber
J Electr Electron Mater. 2015;28(11):694-697.   Published online November 1, 2015
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Thin Films and Sensors : Regular Paper ; Characteristics of Sputtering Carbon Films for the Improvement of Physical Properties in Carbon Fiber
J Electr Electron Mater. 2015;28(11):694-697.   Published online November 1, 2015
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