Abstract

Ferroelectric Pb(Zr_0.52Ti_0.48)O₃ (PZT) films were deposited on SrTiO₃(100) substrate by using conductive SrRuO₃ films as underlayer and their structural and ferroelectric properties were investigated. PZT films were grown in (00l) orientation on well lattice-matched pseudo-cubic SrRuO₃ films. Thickness dependence of ferroelectric and electrical properties of PZT films was investigated. PZT film with 400 nm thickness showed a remanent polarization (P_r) of 29.0 μC/cm² and coercive field (E_c) of 83 kV/cm, and P_r decreased and E_c increased with thickness reduction. The dielectric constant for PZT films showed gradual decrease with thickness reduction. Breakdown field of PZT films did not show the thickness dependence and displayed as high value as 1 MV/cm.

• Keywords: Ferroelectric oxide, Pb(Zr_0.52Ti_0.48)O₃, Pulsed laser deposition, Remanent polarization, Coercive field