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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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유한요소법에 의한 적층형 세라믹 히터의 전극 패턴 최적화

한윤수, 김시연, 여동훈

Optimization of Electrode Pattern for Multilayer Ceramic Heater by Finite Element Method

Yoonsoo Han, Shi Yeon Kim, Dong-hun Yeo
J Electr Electron Mater 2017;30(12):776-781.
Published online: December 1, 2017
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In this study, we investigated the effect of electrode pattern design on the thermal shock resistance and temperature uniformity of a ceramic heater. A cordierite substrate with a low thermal expansion coefficient was fabricated by tape casting, and a tungsten electrode was printed and used as a heating element. The temperature distribution of the ceramic heater was calculated by a finite-element method (FEM) by considering various electrode patterns, and the tensile stress distribution due to the thermal stress was calculated. In the electrode pattern with a single-line width, the central part of the ceramic heater was heated to the maximum temperature, and the position of the ceramic heater having a double-line width was changed to the maximum temperature, depending on the position of the minimum line width pattern. The highest tensile stress was found along the edges of the ceramic heater. The temperature gradient at the edge determined the tensile stress intensity. The smallest tensile stress was observed for electrode pattern D, which was expected to be advantageous in resisting thermal shock failures in ceramic heaters.

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Optimization of Electrode Pattern for Multilayer Ceramic Heater by Finite Element Method
J Electr Electron Mater. 2017;30(12):776-781.   Published online December 1, 2017
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Optimization of Electrode Pattern for Multilayer Ceramic Heater by Finite Element Method
J Electr Electron Mater. 2017;30(12):776-781.   Published online December 1, 2017
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