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ULSI DRAM의 Capacitor 절연막용 BST ( Barium Strontium Titanate ) 박막의 제작과 특성에 관한 연구

류정선, 강성준, 윤영섭

Preparation and Properties of BST ( Barium Strontium Titanate ) Thin Filmd for the Capacitor Dielectrics of ULSI DRAM`s

Jeong Seon Ryoo, Seong Jun Kang, Yong Sup Yoon
J Electr Electron Mater 1996;9(4):336-343.
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Preparation and Properties of BST ( Barium Strontium Titanate ) Thin Filmd for the Capacitor Dielectrics of ULSI DRAM`s
J Electr Electron Mater. 1996;9(4):336-343.
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Preparation and Properties of BST ( Barium Strontium Titanate ) Thin Filmd for the Capacitor Dielectrics of ULSI DRAM`s
J Electr Electron Mater. 1996;9(4):336-343.
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