Optimization of Down Stream Plasma Ashing Process

Se Geun Park; Jong Keun Lee

Articles

Page Path

감광제 건식제거공정의 최적화

박세근, 이종근

Optimization of Down Stream Plasma Ashing Process

Se Geun Park, Jong Keun Lee

J Korean Inst Electr Electron Mater Eng 1996;9(9):918-924.

13 Views
0 Download
0 Crossref
0 Scopus

prev next

Full Article

Download PDF

Cite

CITE

export

Copy Download

Format

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
BibTeX — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

Optimization of Down Stream Plasma Ashing Process

J Korean Inst Electr Electron Mater Eng. 1996;9(9):918-924.

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
bib — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

Optimization of Down Stream Plasma Ashing Process

J Korean Inst Electr Electron Mater Eng. 1996;9(9):918-924.

Articles

Page Path

감광제 건식제거공정의 최적화

Optimization of Down Stream Plasma Ashing Process

Full Article

CITE

Download Citation

Format:

Include:

Related articles

ABOUT

BROWSE ARTICLES

EDITORIAL POLICIES

FOR CONTRIBUTORS