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HVPE 법에 의한 기판재료용 후막 GeN 에피텍셜 성장에 관한 연구

송복식, 김영호, 이재구, 정성훈, 문동찬, 김선태

A Study on the Epitaxial Growth of Thick GaN Films for Substrate Materials by HVPE

Bok Sik Song, Young Ho Kim, Jae Goo Lee, Sung Hoon Chung, Dong Chan Moon, Seon Tai Kim
J Electr Electron Mater 1997;10(4):362-368.
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A Study on the Epitaxial Growth of Thick GaN Films for Substrate Materials by HVPE
J Electr Electron Mater. 1997;10(4):362-368.
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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A Study on the Epitaxial Growth of Thick GaN Films for Substrate Materials by HVPE
J Electr Electron Mater. 1997;10(4):362-368.
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