A Behavior of the Wet Etching of CoNbZr / Cu / CoNbZr Multi - Layer Films

Hyun Sik Kim; Young Seang Lee; Jae Sung Song; Young Woo Oh; Jae Hong Yun

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CoNbZr / Cu / CoNbZr 다층막의 습식 식각 거동

김현식, 이영생, 송재성, 오영우, 윤재홍

A Behavior of the Wet Etching of CoNbZr / Cu / CoNbZr Multi - Layer Films

Hyun Sik Kim, Young Seang Lee, Jae Sung Song, Young Woo Oh, Jae Hong Yun

J Korean Inst Electr Electron Mater Eng 1997;10(7):645-650.

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A Behavior of the Wet Etching of CoNbZr / Cu / CoNbZr Multi - Layer Films

J Korean Inst Electr Electron Mater Eng. 1997;10(7):645-650.

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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A Behavior of the Wet Etching of CoNbZr / Cu / CoNbZr Multi - Layer Films

J Korean Inst Electr Electron Mater Eng. 1997;10(7):645-650.

Articles

Page Path

CoNbZr / Cu / CoNbZr 다층막의 습식 식각 거동

A Behavior of the Wet Etching of CoNbZr / Cu / CoNbZr Multi - Layer Films

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