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SF6+Ar 혼합기체의 전자수송특성 개선에 관한 연구

하성철, 김상남, 유회영, 서상현, 임상원, 전병훈

A Study on the Improvement of the Electron Transport Properties in SF6+Ar Mixtures Gas

Sung Chul Ha, Sang Nam Kim, Heoi Young Yu, Sang Hyeon Seo, Sang Won Lim, Byoung Hun Chun
J Electr Electron Mater 1998;11(1):67-73.
Published online: January 1, 1998
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A Study on the Improvement of the Electron Transport Properties in SF6+Ar Mixtures Gas
J Electr Electron Mater. 1998;11(1):67-73.   Published online January 1, 1998
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
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A Study on the Improvement of the Electron Transport Properties in SF6+Ar Mixtures Gas
J Electr Electron Mater. 1998;11(1):67-73.   Published online January 1, 1998
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