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Batch 형태 LPCVD 법에의한 폴리실리콘의 인농도 및 Rs 특성에 관한 연구

정양희, 김명규

A Study on the Phosphorous Concentration and Rs Property of the Doped Polysilicon by LPCVD Method of Batch type

Yang Hee Jong, Myoung Kyu Kim
J Electr Electron Mater 1998;11(3):195-202.
Published online: March 1, 1998
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A Study on the Phosphorous Concentration and Rs Property of the Doped Polysilicon by LPCVD Method of Batch type
J Electr Electron Mater. 1998;11(3):195-202.   Published online March 1, 1998
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
A Study on the Phosphorous Concentration and Rs Property of the Doped Polysilicon by LPCVD Method of Batch type
J Electr Electron Mater. 1998;11(3):195-202.   Published online March 1, 1998
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