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진공증착증합법에 의해 제조된 폴리이미드 박막의 플라즈마 처리에 의한 표면의 변화

김형권, 이붕주, 김종택, 김영봉, 이덕출

The Surface Effect of Polyimide Thin Film by Vapor Deposition Polymerization Method With Plasma Treatment

Hyeong Gweon Kim, Boong Joo Lee, Jong Taek Kim, Yong Bong Kim, Duck Chool Lee
J Korean Inst Electr Electron Mater Eng 1998;11(5):340-346.
Published online: May 1, 1998
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The Surface Effect of Polyimide Thin Film by Vapor Deposition Polymerization Method With Plasma Treatment
J Korean Inst Electr Electron Mater Eng. 1998;11(5):340-346.   Published online May 1, 1998
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The Surface Effect of Polyimide Thin Film by Vapor Deposition Polymerization Method With Plasma Treatment
J Korean Inst Electr Electron Mater Eng. 1998;11(5):340-346.   Published online May 1, 1998
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